(AGENPARL) – LONDON (UNITED KINGDOM), ven 18 giugno 2021

Phys. Chem. Chem. Phys., 2021, Accepted Manuscript
DOI: 10.1039/D1CP00720C, Paper
Open Access Open Access
Sebastian Grimm, Seung-Jin Baik, Patrick Hemberger, Andras Bodi, Andreas Kempf, Tina Kasper, Burak Atakan
Although aluminium acetylacetonate, Al(C5H7O2)3, is a common precursor for chemical vapor deposition (CVD) of aluminium oxide, its gas phase decomposition is not very well investigated. Here, we studied its thermal…
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Fonte/Source: http://feeds.rsc.org/~r/rss/CP/~3/80NdczU4mJI/D1CP00720C